The DSP-21 type valve is designed and developed to meet the stringent requirements for reliable control of high purity gases for the semiconductor industry, with a particular focus on safety.

• ULTRA CLEAN:
  Diaphragm design.
  Assembly, leak testing and packaging all take place in a class 10 clean room.
• KEY FEATURES:
  Durable SUS316 valve body.
  Rmax4µm gas passage surface.
• SAFETY:
  Double sealed design in gland nut part.

SPECIFICATION
Maximum service pressure	20.0MPa

CV VALUE
For use	0.3
for filling	0.24

Helium Leak Rate
External leak rate	2×10-11[Pa·m3/sec or less] (2×10-10[atmcc/sec])
Internal leak rate	approx.1×10-9 [Pa·m3/sec] (1×10-8[atmcc/sec])

The DST-1 type valve is designed to meet the stringent controls for reliable high purity gases for the semiconductor industry, with a particular focus on safety.

• ULTRA CLEAN:
  Tied-Diaphragm design. Particle free and reduced dead space.
  Assembly, leak testing and packaging all take place in a class 10 clean room.
• KEY FEATURES:
  High flow rate.
  Sufficient purge performance.
  Seat Cassette is replaceable easily.
• SAFETY:
  Double sealed design in gland nut part.

SPECIFICATION
Maximum service pressure	20.0MPa

CV VALUE
For use	0.6
for filling	0.6

Helium Leak Rate
External leak rate	2×10-11[Pa·m3/sec or less] (2×10-10[atmcc/sec])
Internal leak rate	approx.1×10-9 [Pa·m3/sec] (1×10-8[atmcc/sec])

The "D-60" type valve is a springless diaphragm type brass cylinder valve specially designed for standard gases, high purity industrial gases, semiconductor gases and other applications.

• Cleanness:
  Springless diaphragm design and doughnut type gas passage, minimizes the dead space area to improve gas purging performance.
• Performance:
  The donut-shaped gas passage improves vacuum efficiency and increases gas filling productivity.
• SAFETY:
  Recessed pressure relief device reduces the risk of gas leakage by external shock.
  Specially selected high-performance elastic diaphragm, can improve the durability.
• Compact Design:
  Fits most cylinder caps.

SPECIFICATION
Maximum service pressure	22.0MPa

CV VALUE
INLET ➜ OUTLET	0.40
OUTLET ➜ INLET	0.35

The DS-3H valve with pneumatic on-off actuator is a springless diaphragm type seal, carefully designed to meet the stringent controls for reliable high purity gases for the semiconductor industry with a special focus on safety.

• ULTRA CLEAN:
  ● Springless Diaphragm Type.
  Particle free.
  Minimized dead space.
  ● Assembly, leak testing and packaging all take place in a Class 10 clean room.
• KEY FEATURES:
  Diaphragm seal type.
  Improved purge performance.
• SAFETY:
  Double sealed design in gland nut part.
  Normally closed type.
  Built-in locking mechanism to ensure safety during transportation.

SPECIFICATION
Maximum service pressure	20.0MPa

CV VALUE
For use	0.2
for filling	0.2

Helium Leak Rate
External leak rate	2×10-11[Pa·m3/sec or less] (2×10-10[atmcc/sec])
Internal leak rate	approx.1×10-9 [Pa·m3/sec] (1×10-8[atmcc/sec])

The DST-1H valve with pneumatic on-off actuator is a cluster of the tied diaphragm DST-1 series.

• ULTRA CLEAN:
  ● Tied-diaphragm design.
  Particle free and reduced dead space.
  ● Assembly, leak testing and packaging all take place in a Class 10 clean room.
• KEY FEATURES:
  ● High flow rate.
  About 3 times superior in comparison with DS-3H.
  ● Purge performance is improved.
• SAFETY:
  Double sealed design in gland nut part.
  Normally closed type.
  Built-in locking mechanism to ensure safety during transportation.

SPECIFICATION
Maximum service pressure	10.0MPa

CV VALUE
For use	0.6
for filling	0.6

Helium Leak Rate
External leak rate	2×10-11[Pa·m3/sec or less] (2×10-10[atmcc/sec])
Internal leak rate	approx.1×10-9 [Pa·m3/sec] (1×10-8[atmcc/sec])

The DST-1S valve with pneumatic on-off actuator is a cluster of the tied diaphragm DST-1 series.

• ULTRA CLEAN:
  ● Tied-diaphragm design.
  Particle free and reduced dead space.
  ● Assembly, leak testing and packaging all take place in a Class 10 clean room.
• KEY FEATURES:
  ● High flow rate.
  About 3 times superior in comparison with DS-3H.
  ● Purge performance is improved.
• SAFETY:
  Double sealed design in gland nut part.
  Normally closed type.
  Built-in locking mechanism to ensure safety during transportation.

SPECIFICATION
Maximum service pressure	20.0MPa

CV VALUE
For use	0.6
for filling	0.6

Helium Leak Rate
External leak rate	2×10-11[Pa·m3/sec or less] (2×10-10[atmcc/sec])
Internal leak rate	approx.1×10-9 [Pa·m3/sec] (1×10-8[atmcc/sec])

The DS-3L valve with pneumatic on-off actuator is a springless diaphragm type seal and actuator detachable model.

• ULTRA CLEAN:
  ● Springless Diaphragm Type.
  Particle free.
  Minimized dead space.
  ● Assembly, leak testing and packaging all take place in a Class 10 clean room.
• KEY FEATURES:
  Diaphragm seal type.
  Improved purge performance
• SAFETY:
  Double sealed design in gland nut part.
  Normally closed type.

SPECIFICATION
Maximum service pressure	20.0MPa

CV VALUE
For use	0.2
for filling	0.2

Helium Leak Rate
External leak rate	2×10-11[Pa·m3/sec or less] (2×10-10[atmcc/sec])
Internal leak rate	approx.1×10-9 [Pa·m3/sec] (1×10-8[atmcc/sec])

The DST-1L valve with pneumatic on-off actuator is a tied-diaphragm type seal and actuator detachable model.

• ULTRA CLEAN:
  ● Tied-diaphragm design.
  Particle free and reduced dead space.
  ● Assembly, leak testing and packaging all take place in a Class 10 clean room.
• KEY FEATURES:
  ● High flow rate.
  About 3 times superior in comparison with DS-3L.
  ● Purge performance is improved.
• SAFETY:
  Double sealed design in gland nut part.
  Normally closed type.

SPECIFICATION
Maximum service pressure	10.0MPa

CV VALUE
For use	0.6
for filling	0.6

Helium Leak Rate
External leak rate	2×10-11[Pa·m3/sec or less] (2×10-10[atmcc/sec])
Internal leak rate	approx.1×10-9 [Pa·m3/sec] (1×10-8[atmcc/sec])